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Sputter_System_History

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2018

Sungkyunkwan Univ.

Magnetron Co-sputtering System

JUN


- 5 Gun (DC / RF)


- For magnetic material target


- Auto PC control


- Main Chamber heating


- Load lock

National Fusion Research Institute
Capacitively Coupled Plasma (CCP)
OCT
National Fusion Research Institute
Capacitively Coupled Plasma (CCP)
JUN
2017
Kumoh National Institute of Technology
Magnetron Sputtering System
MAR
National Fusion Research Institute (NFRI)
Capacitively Coupled Plasma (CCP) System
JUL
National Fusion Research Institute (NFRI)
Capacitively Coupled Plasma (CCP) System
SEP
2016
Silla University
Magnetron Sputtering System
AUG
Myongji University
Magnetron Sputtering System
JAN
National Fusion Research Institute
Magnetron Sputtering system
SEP
Myongji University
Magnetron Sputtering System
MAR
2015
TEGway
Magnetron Sputtering System
OCT
Korea Basic Science Institute
Magnetron sputtering System
OCT
National Fusion Research Institute
ECR Sputtering System
SEP
Korea Advanced Institute of Science and Technology (KAIST)
Magnetron Sputtering System
NOV
Chonbuk National University
Capacitively Coupled Plasma (CCP) System
NOV
Korea Advanced Institute of Science and Technology (KAIST)
Magnetron Sputtering system
DEC
2014
SK Innovation Co.
Magnetron Sputtering System
AUG
National Fusion Research Institute
Magnetron Sputtering system
APR
National Fusion Research Institute
CCP (Capacitively Coupled Plasma) System
APR
Before 2013